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Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication. Foundations of MEMS Second Edition Chang Liu McCormick School of Engineering and Applied Science Northwestern University International Edition Contributions by Vaishali B. Bhoomaraddi College of Engineering Technology Anil V. Nandi Foundations of MEMS Kindle edition by Chang Liu. Download it once and read it on your Kindle device, PC, phones or tablets. Use features like bookmarks, note taking and highlighting while reading Foundations of MEMS. By Chang Liu For classes in platforms (MEMS) taken by means of complicated undergraduate scholars, starting graduate scholars, and professionals. Foundations of MEMS is an entrylevel textual content designed to systematically educate the specifics of MEMS to an interdisciplinary viewers. 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